JPH0445237Y2 - - Google Patents

Info

Publication number
JPH0445237Y2
JPH0445237Y2 JP1985035317U JP3531785U JPH0445237Y2 JP H0445237 Y2 JPH0445237 Y2 JP H0445237Y2 JP 1985035317 U JP1985035317 U JP 1985035317U JP 3531785 U JP3531785 U JP 3531785U JP H0445237 Y2 JPH0445237 Y2 JP H0445237Y2
Authority
JP
Japan
Prior art keywords
susceptor
substrate
space
reaction vessel
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985035317U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61153337U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985035317U priority Critical patent/JPH0445237Y2/ja
Publication of JPS61153337U publication Critical patent/JPS61153337U/ja
Application granted granted Critical
Publication of JPH0445237Y2 publication Critical patent/JPH0445237Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985035317U 1985-03-14 1985-03-14 Expired JPH0445237Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985035317U JPH0445237Y2 (en]) 1985-03-14 1985-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985035317U JPH0445237Y2 (en]) 1985-03-14 1985-03-14

Publications (2)

Publication Number Publication Date
JPS61153337U JPS61153337U (en]) 1986-09-22
JPH0445237Y2 true JPH0445237Y2 (en]) 1992-10-23

Family

ID=30539482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985035317U Expired JPH0445237Y2 (en]) 1985-03-14 1985-03-14

Country Status (1)

Country Link
JP (1) JPH0445237Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391084A (en) * 1977-01-20 1978-08-10 Gnii Pi Redkometa Method and apparatus for evaporating source matter to evaporation portion
JPS5637296A (en) * 1979-09-05 1981-04-10 Toshiba Ceramics Co Ltd Epitaxially growing apparatus

Also Published As

Publication number Publication date
JPS61153337U (en]) 1986-09-22

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